Moduli RF Spectrometer
The RF Spectrometer is a radio-frequency (RF) detector that directly monitors the harmonics emitted by a plasma from outside the plasma chamber. The sensor is best used in scenarios where integrating an in-line RF sensor is physically impossible. The sensor has been used for endpoint detection and fault detection on production tools. It has demonstrated superior performance to optical techniques for low open area endpoint applications. It has also been proven to detect air leaks, wafer displacement and other serious plasma faults. Simply mount the RF antenna either on the viewport, a matchbox fan or through the matchbox wall to start process characterization
Proximity Installation
The RF Event Detectors are a non-invasive solution for plasma monitoring. This Radio Emission Spectroscopy (RES) tool can be placed anywhere outside the plasma source where small RF leakage is present – at a window port, for example. The antenna is split into two parts; an antenna pick-up which can be inserted within the chamber RF shielding manifold and the circuitry which remains outside. This allows measurement within the RF environment. It allows the user to gather data which correlates with voltage/current in scenarios where an inline solution is impractical.
Measures Electric and Magnetic Fields
Measure parameters which correlate with the magnetic and electric fields from the fundamental and harmonics inside the plasma. These parameters can be used in applications to detect end-point and faults.
Multiple Models
Multiple antenna options for different chamber types, including a novel RF return path sensor to enable harmonic monitoring if a line-of-sight to the plasma is available
Communication Protocols
USB, Ethernet, EtherCAT and Serial communication protocols with easy-to-use APIs for tool/FDC integration.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Part Number/td> | Part | Frequency Range | Notes | |
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02-0260-01 | Acquisiton Unit | 350kHz - 500MHz | Compatible with all antennas | Request info |
| 02-0255-01 | Acquisition Unit | 40kHz - 2MHz | Compatible with all antennas | Request info | |
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02-0494-01 | RF Antenna - 1x | 40kHz - 500MHz | E and B Channel with phases | Request info |
| 02-0495-01 | RF Antenna - 100x | 40kHz - 60MHz | 10x Volatge & 100x Current Channel | Request info |
