Octiv Suite 2.0
The Octiv Suite 2.0 VI probe is the most advanced RF sensor on the market for in-line power and impedance measurement with unrivalled accuracy and functionality. With 1% true accuracy, chamber-to-chamber matching and process repeatability can be established with confidence. This sensor is designed for advanced R&D and live process monitoring. It combines the pulse monitoring features of the Octiv Mono and the harmonic spectrum capabilities of the Octiv Poly with advanced functionality such as reconstruction of the time domain RF voltage and current waveform, using proprietary harmonic phase deconvolution techniques in the digitization process, making real time monitoring of the ion flux possible when mounted in-line with the process substrate. Uniquely, this sensor allows the process electrode to be employed in a secondary role as a planar Langmuir probe, enabling plasma density and electron temperature determination.
Multiple Frequencies
Only one sensor required for multiple frequency applications, saving significant cost. Measurements available when frequency is +/-10% of the calibrated frequency.
Measures Harmonics
Measure all parameters available for up to 15 harmonics of the fundamental frequency and plot a harmonic profile.
Measures Ion Flux
Measure the ion flux to your substrate live on your tool. Ion flux monitoring capability provides a direct correlation with etch and deposition rates.
Pulse Features
Measure the waveform of your pulse with our time-resolution mode. Pulsed RF monitoring for multi level pulsing and multiple frequencies simultaneously.
Measurement Accuracy
1% accurate voltage, current, power and impedance over a range of impedances traceable to NIST, ensuring reproducible and repeatable data from sensor to sensor.
Multiple Models
We have multiple models to suit you installation and voltage/current/power requirements for seamless integration into your process equipment and control loop.
Communication Protocols
Supports Ethernet, EtherCAT, RS232, and USB, with APIs provided for seamless integration into any system.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Part Number | Frequency Range | Max Power | Max Voltage/Current | Connectors | |
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02-0325-01 | 40kHz-4MHz | 0.5W - 5kW * | 1.85kVpk/9Arms | Quick change** | Request info |
| 02-0322-02 | 350kHz - 240MHz | 1.5W - 12kW * | 1.85kVpk/9Arms | Quick change** | Request info | |
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02-0312-01 | 350kHz - 240MHz | 1.5W - 12kW * | 1.85kVpk/80*Arms | 6mm Socket | Request info |
| 02-0315-01 | 350kHz - 240MHz | 1.5W - 12kW * | 22.6kVpk-pk/120Arms | 20mm Socket | Request info | |
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02-0319-01 | 350kHz - 240MHz | 3W - 30kW * | 19.8kVpk-pk/120Arms | EIA 1-5/8 | Request info |
| 02-0321-01 | 350kHz - 240MHz | 9W - 90kW * | 33.9kVpk-pk/500Arms | EIA 3-1/8 | Request info |
