Langmuir Probe
The Langmuir Probe is one of the most widely used plasma measurement instruments. It is used to measure the characteristics of the bulk plasma region. The Impedans Langmuir Probe System measures the key plasma parameters such as plasma potential, charged particle density (electron & ion), the electron temperature and the electron energy distribution function using the most advanced theoretical models available. Langmuir Probe measurements provide the user with fundamental insights into the physical phenomena that govern plasma behaviour. It measures the parameters in real time, allowing you to make changes and monitor the effects live, saving hours of unnecessary setup and waiting. With an 80 MS/s sampling rate, pulse profiling and single shot plasmas can be measured with unrivalled time resolution.
The Impedans Langmuir Probe stands out in this field due to its advanced design, high sensitivity, and the ability to operate in various plasma environments, from low-pressure laboratory plasmas to more complex industrial plasma systems. Our Langmuir probe Systems have been used in 100’s of publications and are accepted within the community as a reliable data source.
Measures key process parameters live
Measure the key plasma parameters such as electron temperature, ion density, plasma potential and electron energy distribution function.
Spatial Measurements
All of the products in our Langmuir range come with an optional linear drive. This can be used to automatically scan across the wafer and spatially characterize your plasma.
Multiple Probe Head Options with Replaceable Tips
All of our langmuir systems come with options for single probe, double probe, planar, spherical and mach probe heads where the heads can be interchanged and the tips can be easily replaced.
Multiple Probe Models
We have multiple models including fixed shaft and flexible shaft versions which allow for easy installation in all scenarios.
Easy Installation
Our Langmuir Probe systems are modular and can be quickly and easily installed on chambers with various flange options. Our probes are also compatible with almost all chamber types.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
RF Filters
Our Langmuir Probe systems come with inbuilt RF filters which ensure the accuracy of the data.
Automatic Tip Cleaning
Our Langmuir Probe systems come with the ability to clean automatically in the plasma using ion bombardment.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Name | Part Number | Description | Current Range | |
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Langmuir probe | Electronics Unit | 02-0241-01 | Langmuir probe | Electronics Unit | 1.5uA- 1A | Request info |
| Langmuir probe | Electronics Unit | 02-0045-01 | Langmuir probe | Electronics Unit | 15nA – 150mA | Request info | |
| Langmuir probe | Electronics Unit | 02-0460-01 | Langmuir probe | Electronics Unit | 1.5nA - 15mA | Request info | |
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Fixed Probe 10mm | 02-0144-02 | 10 mm OD, rigid, Alumina Shaft | Request info | |
| Fixed Probe 6.5mm | 02-0463-01 | 6.5mm OD rigid, ceramic-coated stainless steel (High Temperature) shaft | Request info | ||
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Feed-through for flexible shaft models | 02-0265-01 | Feed-through for flexible Langmuir Probes | Request info | |
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Flexible 10mm Shaft | 02-0466-01 | Rigid tip section with flexible ceramic beaded cable | Request info | |
| Flexible 6.5mm Shaft | 02-0467-01 | Rigid tip section with flexible ceramic beaded cable | Request info | ||
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150mm Linear Drive | 02-0507-01 | For rigid probe shafts only | Request info | |
| 300mm Linear Drive | 02-0033-03 | For rigid probe shafts only | Request info | ||
| 450mm Linear Drive | 02-0034-04 | For rigid probe shafts only | Request info | ||
| 600mm Linear Drive | 02-0035-04 | For rigid probe shafts only | Request info | ||
| 900mm Linear Drive | 02-0508-01 | For rigid probe shafts only | Request info |
