Moduli RF Event Detector
The Moduli RF Event Detector is an advanced, all-in-one diagnostic instrument for plasma arc detection and RF pulse monitoring. The Moduli architecture enables real-time processing of RF measurements with one microsecond resolution. It is designed to detect and characterize arcs while simultaneously monitoring every RF pulse to check that each pulse is within a predefined specification. Arcs and misfiring RF pulses can lead to wafer defects, therefore, the Moduli RF Event Detector is an essential tool for rapid troubleshooting and 24/7 monitoring
Proximity Installation
The Moduli RF detectors do not require any tool modification and can pick up RF anywhere RF is present.
Detects and Characterises Arcs
Detects Arcs Snapshot function to view pulse profile. Monitors on time pulse frequency and duty cycle of every pulse
Monitor RF Pulses
Monitor on-time, pulse frequency and duty cycle of every pulse and report on deviations. ON-OFF and multi-level pulsing (up to 3 levels).
Recipe Function
Adjust the sensors settings automatically for complex multi step plasma processes.
Snapshot Function
Take a snapshot of events or at a dedicated time to check pulse shape.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
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| Product | Part Number | Part | Frequency Range | Notes | |
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02-0493-01 | Acquisiton Unit | 350kHz - 500MHz | Compatible with all antennas | Request info |
| 02-0255-01 | Acquisition Unit | 40kHz - 2MHz | Compatible with all antennas | Request info | |
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02-0494-01 | RF Antenna - 1x | 40kHz - 500MHZ | E and B Channel | Request info |
| 02-0495-01 | RF Antenna - 100x | 40kHz - 60MHz | 10x E & 100x B Channel | Request info |
