Our range of sensors including rf sensors, substrate level sensors, and bulk plasma sensors, are designed to give accurate and reliable measurements of various plasma-related parameters, such as ion energy, ion flux, plasma density, and electron temperature. We work closely with our customers to help them optimize their equipment and process development to reduce downtime, and increase their yield and throughput. Our sensors are also used as calibration and verification standards for RF generator manufacturing, repair, and maintenance. Our expertise in the industry and our commitment to quality and innovation make us the ideal partner for plasma equipment makers looking to take their product to the next level.
Impedans sensors offer precise measurements, ensuring reliable data for various applications.
Impedans sensors enhance consistency and repeatability for better process control and optimization.
Impedans diagnostics offer accurate and real-time measurements of plasma parameters. This data enables operators to optimize process conditions, leading to enhanced efficiency and consistency. By identifying issues and variations in the plasma process, Impedans diagnostics help fine-tune equipment settings, resulting in better yield and product quality.
Plasma diagnostics contribute to the development of new technologies and improved processes by providing critical insights into plasma behavior and characteristics.
Download Case Study
Impedans plasma diagnostic tools have been employed in hundreds of experiments and cited in numerous scientific journals. They are also trusted by semiconductor equipment manufacturers, subsystem suppliers, and industry leaders for a wide range of applications, making them a reliable source of data. Download the case study below to explore the diverse applications of our tools.
