Quantum RFEA & QCM
The Quantum system consists of a retarding field energy analyser with integrated quartz crystal microbalance (QCM), used to measure the ion energy distribution (IED) and the ion-neutral deposition ratio at a surface inside a plasma reactor. This system measures and displays deposition rates, IED, ion flux and the DC bias voltage at the surface on which the sensor is deployed. Using crystals coated with specified materials, the system can also measure etch rates of ions and neutrals. The system was designed to be mounted on electrically biased surfaces including radio-frequency (RF). A unique shielding structure allows accurate detection of the millivolt level, 6 MHz, crystal oscillation frequency in the presence of RF bias levels up to 900 V peak-to-peak. Unlike other QCM systems, no water cooling of the crystals is needed. A compensation crystal, mounted next to the measurement crystal, is not exposed to plasma particles and used to compensate for temperature effects on the oscillating frequency of the measurement
Measure key process parameters live
Measure the key parameters of process performance; ion flux, ion energy distribution function and deposition in real time. Measures ion energy range upto 2000 eV
Deposition Rates
The quantum system has an embedded quartz crystal microbalance that allows deposition rate to be monitored with a resolution of 12.3ng/cm2
Substrate Options
Our RFEA sensors come with multiple substrate shapes and materials. The sensing elements and holder substrates are available in anodised aluminium, bare aluminium or stainless-steel options.
Replaceable Elements
All of our systems come with replaceable sensing elements (button probes) which can be easily replaced when maintenance is needed.
Easy Installation
Our Quantum systems are modular and can be quickly and easily installed on chambers with various flange options.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Name | Part Number | Description | |
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Box - Standard 19-inch rack unit | 02-0129-01 | Compatible for Quantum Holders | Request info |
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FT – Vaccum interface | 02-0130-02 | Compatible for Quantum Holders | Request info |
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100mm Holder | 02-0132-01 | 1 Measurement Button, 1 Calibration Button | Request info |
| 300mm Holder | 02-0132-01 | 1 Measurement Button, 1 Calibration Button | Request info | |
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Low Density | 02-0474-02 | Ion Flux Range 0.001 to 3 Am-2 | Request info |
| Standard Density | 02-0133-01 | Ion Flux Range 0.01 to 50 Am-2 | Request info | |
| High Density | 02-0477-01 | Ion Flux Range 0.1 to 700 Am-2 | Request info | |
| Calibration Button | 02-0134-01 | Used as a temperature reference for the quartz crystal microbalance | Request info |
