Octiv Poly 2.0
The Octiv Poly 2.0 VI probe is a multi-frequency in-line RF voltage, current and phase measurement system with network communication (Ethernet Web Service Protocol, EtherNet/IP or EtherCAT available). With 1% true accuracy, chamber-to-chamber matching and process repeatability can be established with confidence. Uniquely convenient form-factors enable retrofitting to match box outputs to facilitate direct plasma monitoring. It can measure 5 fundamental frequencies and up to 15 harmonics simultaneously. Issues such as product scrap events, endpoint detection errors and unnecessary preventative maintenance can all be eliminated with this advanced VI probe technology.
Multiple Frequencies
Only one sensor required for multiple frequency applications, saving significant cost. Measurements available when frequency is +/-10% of the calibrated frequency.
Measures Harmonics
Measure all parameters available for up to 15 harmonics of the fundamental frequency and plot a harmonic profile.
Pulse Features
Measure the waveform of your pulse with our time-resolution mode.
Measurement Accuracy
1% accurate voltage, current, power and impedance over a range of impedances traceable to NIST, ensuring reproducible and repeatable data from sensor to sensor.
Multiple Models
We have multiple models to suit you installation and voltage/current/power requirements for seamless integration into your process equipment and control loop.
Communication Protocols
Supports Ethernet, EtherCAT, RS232, and USB, with APIs provided for seamless integration into any system.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Part Number | Frequency Range | Max Power | Max Voltage/Current | Connectors | |
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02-0324-01 | 40kHz-4MHz | 0.5W - 5kW * | 1.85kVpk/9Arms | Quick change** | Request info |
| 02-0232-02 | 350kHz - 240MHz | 1.5W - 12kW * | 1.85kVpk/9Arms | Quick change** | Request info | |
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02-0307-01 | 350kHz - 240MHz | 1.5W - 12kW * | 1.85kVpk/80*Arms | 6mm Socket | Request info |
| 02-0314-01 | 350kHz - 240MHz | 1.5W - 12kW * | 22.6kVpk-pk/120Arms | 20mm Socket | Request info | |
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02-0252-01 | 350kHz - 240MHz | 3W - 30kW * | 19.8kVpk-pk/120Arms | EIA 1-5/8 | Request info |
| 02-0306-01 | 350kHz - 240MHz | 9W - 90kW * | 33.9kVpk-pk/500Arms | EIA 3-1/8 | Request info |
