RF Event Detectors
The RF event detectors are advanced, all-in-one diagnostic instruments for plasma arc detection and RF pulse monitoring. The Alfven architecture enables real-time processing of RF measurements with one microsecond resolution. It is designed to detect and characterize arcs while simultaneously monitoring every RF pulse to check that each pulse is within a predefined specification. Arcs and misfiring RF pulses can lead to wafer defects, therefore, the Impedans RF event detector is an essential tool for rapid troubleshooting and continuous monitoring.
Detects and characterises Arcs
Detect arcs that could be damaging your product and classify them into categories based on amplitude and duration.
Monitors RF Pulses
Monitor ON-time, pulse frequency and duty cycle of every pulse and report on deviations.
Recipe Function
Adjust the sensors settings automatically for complex multi step plasma processes.
Snapshot Function
Take a snapshot of events or at a dedicated time to check pulse shape.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
| Product |
|
 |
| Name | Alfven 100 | Moduli RF EventDetector |
| Installation Type | Inline | Proximity - requires viewport or exposure to RF |
| # of Frequencies | 1 | 1 |
| Voltage | Yes - But uncalibrated | Yes - But uncalibrated |
| Current | Yes - But uncalibrated | Yes - But uncalibrated |
| Pulse Frequency | ||
| Duty Cycle | ||
| Pulse Detection | ||
| Arc Detection | ||
| Read More | Read More |
