Semion pDC
The Semion Pulsed DC system is a precision plasma measurement instrument used to measure the time dependence of the ion energy distribution arriving at any surface in a plasma chamber. The Semion Pulsed DC system is the key instrument used to measure the temporal evolution of the ion energy and flux at different times through the pulse period of a pulsed DC plasma process. It is the only commercial RFEA technology on the market with sub-microsecond time resolution. The Semion pDC system provides 44ns time resolution for pulsed plasmas up to 350 kHz. The Semion Pulsed DC can be placed on a high voltage biased or grounded surface. Among the key parameters measured are Ion Energy, Ion Flux and electrode voltage. A range of replaceable sensing elements with different signal sensitivities are available to probe a wide range of plasma ion current densities. A large number of publications have highlighted the Semion PDC for applications in academic research and it has served as the industry benchmark for substrate level measurement in process development projects.
Measure key process parameters live
Measure the key parameters of process performance; ion flux and ion energy distribution function and electrode voltage in real time.
Pulsed DC Measurements
Measure the ion energy distribution function and the ion flux throughout the DC pulse with a 44 ns time resolution. It can measure on a pulsed DC biased electrode with up to 400V peak-to-peak applied.
Substrate Options
Our RFEA sensors come with multiple substrate shapes and materials.The sensing elements and holder substrates are available in anodised aluminium, bare aluminium or stainless-steel options.
Replaceable Elements
Our RFEA systems have a range of replaceable sensing elements (button probes) with different signal sensitivities to probe a wide range of plasma ion current densities. They also allow for a range of pressures meaning a single system can be used for multiple plasma densities and pressure ranges.
Easy Installation
Our Semion systems are modular and can be quickly and easily installed on chambers with various flange options.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Name | Part Number | Description | |
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Semion pDC Electronics Unit. | 02-0549-01 | Compatible for all Semion pDC holders | Request info |
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Semion pDC Feedthrough | 02-0754-01 | Compatible with all Semion pDC holders | Request info |
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50mm Holder | 02-0528-01 | 1 sensing element | Request info |
| 70mm Holder | 02-0551-01 | 1 sensing element | Request info | |
| 100mm Holder | 02-0531-01 | 1 sensing element | Request info | |
| 150mm Holder | 02-0534-01 | 1 sensing element | Request info | |
| 200mm Holder | 02-0537-01 | 1 sensing element | Request info | |
| 300mm Holder | 02-0540-01 | 1 sensing element | Request info | |
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Low Density | 02-0342-01 | 0.001 to 3 Am-2 | Request info |
| Standard Density | 02-0339-01 | 0.01 to 50 Am-2 | Request info | |
| High Density | 02-0345-01 | 0.1 to 700 Am-2 | Request info |
