Semion RFEA
The Semion Retarding Field Energy Analyser (RFEA) system measures the ion flux and ion energy distribution hitting a surface in real-time using an imitation substrate (holder plate) with integrated sensors. The Semion Multi Sensor system can have up to 13 sensing elements distributed around the imitation substrate, which is primarily used to investigate the uniformity of ion energy and ion flux at the substrate in industrial plasma applications. A range of replaceable sensing elements with different signal sensitivities are available to probe a wide range of plasma ion current densities. This is the industry standard for substrate level measurement of the ion energy distribution, used in over 100 publications for fundamental research and plasma process development.
Measure key process parameters live
Measure the key parameters of process performance; ion flux and ion energy distribution function.
Spatial Measurement for Plasma Uniformity
Options for multi sensor holder substrates that allow the user to monitor plasma uniformity.
Substrate Options
Our RFEA sensors come with multiple substrate shapes and materials.The sensing elements and holder substrates are available in anodised aluminium, bare aluminium or stainless-steel options. Holders with different shapes and designs available upon request.
Replaceable Elements
Our RFEA systems have a range of replaceable sensing elements (button probes) with different signal sensitivities to probe a wide range of plasma ion current densities. They also allow for a range of pressures meaning a single system can be used for multiple plasma densities and pressure ranges.
Easy Installation
Our Semion systems are modular and can be quickly and easily installed on chambers with various flange options.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
The system will automatically calculate the IEDF results and in the case of a multi sensor Semion system the software will generate contour maps of energy and flux over the wafer area.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Name | Part Number | Description | ||
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Semion Single Electronics Unit | 02-0121-03 | Compatible with single holders only | Request info | |
| Semion Multi Electronics Unit | 02-0122-03 | Compatible for all holders | Request info | ||
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Semion Single Feedthrough | 02-0117-03 | Compatible with single holders only | Request info | |
| Semion Multi Feedthrough | 02-0118-03 | Compatible for all holders | Request info | ||
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50mm Single Holder | 02-0132-01 | Single Holders also available up to 300mm | Request info | |
| 70mm Single Holder | 02-0399-01 | 1 sensing element mounting holes available | Request info | ||
| 150mm Multi Holder | 02-0423-01 | 7 sensing elements | Request info | ||
| 200mm Multi Holder | 02-0435-01 | 9 sensing elements | Request info | ||
| 300mm Multi Holder | 02-0447-01 | 13 sensing elements | Request info | ||
| 450mm Multi Holder | 02-0450-01 | 13 sensing elements | Request info | ||
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Low Density | 02-0333-01 | 0.001 to 3 Am-2 | Request info | |
| Standard Density | 02-0007-05 | 0.01 to 50 Am-2 | Request info | ||
| High Density | 02-0336-01 | 0.1 to 700 Am-2 | Request info | ||
| Sensing Elements (Button probes) | 02-0133-01 | Standard Density | Request info |
