RF Voltage-Current (VI) Probes
Impedans RF sensors are cutting-edge devices designed to measure the radio frequency (RF) parameters. These sensors are used in a wide range of applications, including fundamental plasma research, chamber and process design, live process monitoring, and manufacture, maintenance and repair of RF plasma equipment. The Octiv sensors deliver precise in-line RF power and impedance measurements for both continuous wave and pulsed RF applications, while the Moduli enables electromagnetic field detection from any RF source. Additional features allow you to measure the same parameters for up to 15 harmonics of the fundamental frequency as well as recreate the RF waveform and predict the ion flux of your plasma.
Measure Multiple Frequencies Simultaneously
Only one sensor required for multiple frequency applications, saving significant cost. Measurements available when frequency is +/-10% of the calibrated frequency.
Measurement Accuracy
1% Accurate voltage, current, power and impedance over a range of impedances traceable to NIST, ensuring reproducible and repeatable data from sensor to sensor.
Pulse Features
Measure the waveform of your pulse with our time-resolution mode.
Multiple Models
We have multiple models to suit your installation and voltage/current/power requirements for seamless integration into your process equipment and control loop.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Communication Protocols
Ethernet, EtherCAT, RS232 and USB APIs available for ease of integration with any system.
| Product |
|
 |
|
|
| Name | RF Spectrometer | Octiv Mono | Octiv Poly | Octiv Suite |
| Installation Type | Proximity | Inline | Inline | Inline |
| # of Frequencies | 5 | 5 | 5 | 5 |
| # of Simultaneous Frequencies | 5 | 1 | 5 | 5 |
| Real Power | ||||
| FWD Power | ||||
| REF Power | ||||
| Impedance | ||||
| Voltage | Yes - But uncalibrated | |||
| Current | Yes - But uncalibrated | |||
| Phase Angle | ||||
| Harmonics | Yes - But uncalibrated | |||
| Ion Flux | ||||
| RF Waveform | ||||
| Pulse Frequency | ||||
| Duty Cycle | ||||
| Read More | Read More | Read More | Read More |
