Bulk Plasma Measurement
Measuring plasma parameters is crucial for understanding plasma behaviour, validating theoretical models, and optimising processes in plasma-based applications. The Langmuir Probe is one of the most common and widely used plasma diagnostics and measures plasma potential, plasma density, electron energy distribution function and electron temperature in the bulk of the plasma. The Plato probe is a unique planar Langmuir Probe designed by Impedans which continues to work even in applications where an insulating film is being deposited.
Measure key process parameters live
Measure the key plasma parameters such as electron temperature, ion density, plasma potential and electron energy distribution function.
Easy Installation
Our Langmuir Probe systems are modular and can be quickly and easily installed on chambers with various flange options. Our probes are also compatible with almost all chamber types.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Spatial Measurements
All of the products in our Langmuir range come with an optional linear drive. This can be used to automatically scan across the wafer and spatially characterise your plasma.
Replaceable Tips
All of our systems come with replaceable tips making it easy to maintain the system.
