Alfven 100
The Alfven 100 is an advanced, all-in-one diagnostic instrument for plasma arc detection and RF pulse monitoring. The Alfven architecture enables real-time processing of RF measurements with one microsecond resolution. It is designed to detect and characterize arcs while simultaneously monitoring every RF pulse to check that each pulse is within a predefined specification. Arcs and misfiring RF pulses can lead to wafer defects, therefore, the Alfven 100 is an essential tool for rapid troubleshooting and 24/7 monitoring.
Detect & Characterise Arcs
Detect arcs that could be damaging your product and classify them into categories based on amplitude and duration. The sensor monitors and classifies the number of arcs per process, which can lead to undesirable particle creation, generating a summary report for the process. The classification of the arcs is configurable within the software, allowing the user to set severity bands based on arc amplitude and duration. The sensors have a 1 μs resolution for arcs (with adjustable noise filter).
Monitor RF Pulses
Monitor on-time, pulse frequency and duty cycle of every pulse and report on deviations.
Recipe Function
Adjust the sensors settings automatically for complex multi step plasma processes.
Snapshot Function
Take a snapshot of events or at a dedicated time to check pulse shape.
The sensor comes with a snapshot feature which allows you to take a snapshot of any events but also to schedule snapshots so that you can periodically monitor the pulsing characteristics. This saves time and cost to set up directional coupler-to-oscilloscope measurements.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Part Number | Frequency Range | Max Power | Max Voltage/Current | Connectors | |
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02-0260-01 | 40kHz-121MHz | 1.5W - 12KW * | 1.85 kVpk / 9* ARMS | Quick change** | Request info |
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02-0496-01 | 40 kHz - 121 MHz | 1.5W - 12KW * | 1.85 kVpk/ 60* ARMS | 6mm Socket | Request info |
| 02-0498-01 | 400 kHz - 121 MHz | 1.5W - 12KW * | 19.8 kVpk-pk /120ARMS | 20mm Socket | Request info | |
| 02-0497-01 | 400 kHz - 121 MHz | 1.5W - 12KW * | 22.6 kVpk-pk /120ARMS | 20mm Socket | Request info | |
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02-0499-01 | 400 kHz - 121 MHz | 3W - 30KW | 19.8 kVpk-pk /120ARMS | EIA 1-5/8 | Request info |
| 02-0500-01 | 400 kHz - 121 MHz | 9W - 90KW | 33.9 kVpk-pk /500ARMS | EIA 3-1/8 | Request info |
* connector dependent | ** custom options available
