Plato Probe
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film will be deposited on the probe surface. The deposition tolerant probe can remain inside a plasma reactor while deposition processes are in progress. This allows the plasma parameters such as plasma density, ion current density and electron temperature to be measured in systems where a standard Langmuir probe would not be suitable, such as plasma enhanced chemical vapour deposition (PECVD) systems. This probe also has a sync function for time resolved measurements, to look at plasma evolution in Pulsed DC and HiPIMS processes with 1 microsecond resolution.
Measures key process parameters live
Measure the key plasma parameters such as electron temperature, ion density and ion flux.
Deposition Tolerant
The probe functions correctly even when coated with a thin layer of non conductive material.
Spatial Measurements
All of the products in our Plato range come with an optional linear drive. This can be used to automatically scan across the wafer and spatially characterize your plasma.
Multiple probe models
We have multiple models including fixed shaft and flexible shaft versions which allow for easy installation in all scenarios.
Replaceable Tips
All of our Plato Probes come with tips that can be easily replaced.
Easy Installation
Our Plato Probe systems are modular and can be quickly and easily installed on chambers with various flange options. Our probes are also compatible with almost all chamber types.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Name | Part Number | Description | |
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Fixed Probe 10mm | 02-0073-01 | 10mm OD, rigid, Alumina Shaft | Request info |
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Flexible Probe | 02-0240-01 | Rigid tip section with flexible ceramic beaded cable | Request info |
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Feed-through for flexible shaft models | 02-0239-01 | Feed-through for flexible Plato Probes | Request info |
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Electronics Unit | 02-0238-01 | VI scanning and measurement electronics | Request info |
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150mm Linear Drive | 02-0507-01 | For rigid probe shafts only | Request info |
| 300mm Linear Drive | 02-0033-03 | For rigid probe shafts only | Request info | |
| 450mm Linear Drive | 02-0034-04 | For rigid probe shafts only | Request info | |
| 600mm Linear Drive | 02-0035-04 | For rigid probe shafts only | Request info | |
| 900mm Linear Drive | 02-0508-01 | For rigid probe shafts only | Request info |
