Semion 3KeV
The Semion 3keV System is a new Retarding Field Energy Analyser (RFEA) from Impedans Ltd which extends the range of the Semion sensor platform. It can measure the ion flux and ion energy distribution function in real time with up to 3 kV, three times what the standard Semion system can achieve under RF bias conditions. The sensor consists of an anodized aluminium wafer (as standard) with a single sensing element placed where the substrate would normally sit. The sensing element can have various current sensitivities depending on the expected plasma density, covering the full range of plasma applications. The Semion 3 kV System is the ideal sensor for rapid plasma characterisation, based on the industry standard ion energy measurement platform, which has over 100 publications to date.
Measure key process parameters live
Measure the key parameters of process performance; ion flux and ion energy distribution function.
3kV RF Bias & Energy Range
The system can measure energy range for a RF Bias Voltage (Applied to Sensor) of maximum 3000 V peak-to-peak at 13.56MHz
Substrate Options
Our RFEA sensors come with multiple substrate shapes and materials. The sensing elements and holder substrates are available in anodised aluminium, bare aluminium or stainless-steel options.
Replaceable Elements
All of our systems come with replaceable sensing elements (button probes) which can be easily replaced when maintenance is needed.
Easy Installation
Our semion systems are modular and can be quickly and easily installed on chambers with various flange options.
Intuitive Software
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
Product resources
Delve into our comprehensive collection of resources tailored specifically for this product. From user manuals to video tutorials and case studies, explore everything you need to optimize your experience and maximize the potential of our innovative solution
| Product | Name | Part Number | Description | Current Range | |
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Semion 3keV Electronics Unit | 02-0550-02 | Semion 2keV Electronics Unit | Request info | |
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Semion 3keV Feedthrough | 02-0629-03 | Semion 3keV Feedthrough | Request info | |
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100mm Holder | 02-0716-02 | 1 sensing element | Request info | |
| 100mm Cut Side holder | 02-0756-02 | 1 sensing element | Request info | ||
| 200mm Holder | 02-0578-02 | 1 sensing element | Request info | ||
| 300mm Holder | 02-0774-02 | 1 sensing element | Request info | ||
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Sensing Elements (Button probes) | 02-0369-01 | Low Density | 0.001 to 3 Am-2 | Request info |
| Sensing Elements (Button probes) | 02-0366-01 | Standard Density | 0.01 to 50 Am-2 | Request info | |
| Sensing Elements (Button probes) | 02-0372-01 | High Density | 0.1 to 700 Am-2 | Request info |
